Azimuth angle measurement
US8040511B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2009 |
| Grant date | Oct 18, 2011 |
| Priority date | — |
| Expiry date | Apr 23, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and apparatus for measuring an optical azimuth angle φO of a substrate relative to a plane of detection in scatterometry tools are disclosed. A grating target on a stage of a scatterometry tool may be illuminated and positions of the resulting diffraction orders may be observed. The optical azimuth angle may be determined from the positions of the diffraction orders. Alternatively, polarization-dependent signals of radiation scattered from a line grating may be measured for equal and opposite polarization angles +A and −A. A combination signal may be computed from the polarization-dependent signals obtained at +A and −A and a property of the combination signal may be calculated for several mechanical Azimuth angles φM. A relationship between the optical azimuth angle φO and the mechanical azimuth angle φM may be determined from a behavior of the property as a function of mechanical azimuth angle φM.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.