Microelectronic device
US8043880B2 · kind B2 · utility
2Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 28, 2005 |
| Grant date | Oct 25, 2011 |
| Priority date | — |
| Expiry date | Apr 28, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00285
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
One embodiment of a microelectronic component system includes a base adapted for supporting a microelectronic component, a membrane sealed to the base, and a glass lid built-up on the membrane and hermetically sealing the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.