Patent · US Active

Microelectronic device

US8043880B2 · kind B2 · utility

2Cited by
2References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 28, 2005
Grant dateOct 25, 2011
Priority date
Expiry dateApr 28, 2030

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81C1/00285
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

One embodiment of a microelectronic component system includes a base adapted for supporting a microelectronic component, a membrane sealed to the base, and a glass lid built-up on the membrane and hermetically sealing the membrane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.