MEMS power inductor
US8044755B2 · kind B2 · utility
13Cited by
32References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2008 |
| Grant date | Oct 25, 2011 |
| Priority date | — |
| Expiry date | Nov 20, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4913
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scalable MEMS inductor is formed on the top surface of a semiconductor die. The MEMS inductor includes a plurality of magnetic lower laminations, a circular trace that lies over and spaced apart from the magnetic lower laminations, and a plurality of upper laminations that lie over and spaced apart from the circular trace.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.