Analog data-input device provided with a pressure sensor of a microelectromechanical type
US8044929B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 30, 2006 |
| Grant date | Oct 25, 2011 |
| Priority date | — |
| Expiry date | Jun 14, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/181
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a data-input device an actuator element that can be manually actuated, and a sensor mechanically coupled to the actuator element. The sensor is formed in a body of semiconductor material housing a first sensitive element, which detects the actuation of the actuator element and generates electrical control signals. The first sensitive element is a microelectromechanical pressure sensor, formed by: a cavity made within the body; a diaphragm made in a surface portion of the body and suspended above the cavity; and piezoresistive transducer elements integrated in peripheral surface portions of the diaphragm in order to detect its deformations upon actuation of the actuator element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.