Product setup sharing for multiple inspection systems
US8045788B2 · kind B2 · utility
17Cited by
48References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2004 |
| Grant date | Oct 25, 2011 |
| Priority date | — |
| Expiry date | Jul 7, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49131
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
An inspection tool includes a camera for obtaining images of a wafer and a controller configured for performing light source flat field correction, optical image warping correction, and optical image scale correction of the images. In operation, separate inspection tools are calibrated separately to obtain a characteristic response with respect to imaging and/or illumination for each such inspection tool. A standard target is then imaged by each inspection tool and the response of each of the inspection tools is normalized to ensure uniformity of the output of each inspection tool with respect to the other inspection tools.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.