Cleaning method of a rotary piston vacuum pump
US8047817B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2004 |
| Grant date | Nov 1, 2011 |
| Priority date | — |
| Expiry date | Nov 12, 2027 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2280/02
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A method for managing deposits within a pump mechanism (81) is provided. Fluid suitable for dissolving, diluting or otherwise disengaging deposits which have accumulated on the internal working surfaces of the pump is brought into contact with the mechanism. The performance of the pump is monitored and this data is used together with process data received from, or associated with, a tool (83) being evacuated by the pump to calculate (80) fluid flow characteristics which are required to compensate for the accumulation of deposits on the internal working surfaces of the pump. Fluid is then introduced (2, 84) into the pumping mechanism in accordance with the calculated fluid flow characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.