Substrate with feedthrough and method for producing the same
US8048801B2 · kind B2 · utility
0Cited by
13References
24Claims
0Family size
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Key dates
| Filing date | May 21, 2007 |
| Grant date | Nov 1, 2011 |
| Priority date | — |
| Expiry date | Jul 11, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/19041
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate with first and second main surfaces includes at least one channel extending from the first main surface to the second main surface. The at least one channel includes a first cross-sectional area at a first location and a second cross-sectional area at a second location. An electrically conductive first material is disposed in the at least one channel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.