Patent · US Active

Substrate with feedthrough and method for producing the same

US8048801B2 · kind B2 · utility

0Cited by
13References
24Claims
0Family size

Assignees

Inventors

Key dates

Filing dateMay 21, 2007
Grant dateNov 1, 2011
Priority date
Expiry dateJul 11, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/19041
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A substrate with first and second main surfaces includes at least one channel extending from the first main surface to the second main surface. The at least one channel includes a first cross-sectional area at a first location and a second cross-sectional area at a second location. An electrically conductive first material is disposed in the at least one channel.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.