Yield evaluating apparatus and method thereof
US8051394B2 · kind B2 · utility
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14Claims
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Key dates
| Filing date | Nov 3, 2008 |
| Grant date | Nov 1, 2011 |
| Priority date | — |
| Expiry date | Jan 9, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2111/08
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A yield evaluating apparatus and a method thereof are provided. The yield evaluating apparatus includes a spatial correlation module. The spatial correlation module receives at least one process-related data and a plurality of circuit layouts and obtains a correlation coefficient between unit elements in the circuit layouts according to the process-related data. The spatial correlation module calculates a spatial correlation between elements in each of the circuit layouts according to the correlation coefficient and selects one of the circuit layouts according to the spatial correlations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.