Object-processing apparatus controlling production of particles in electric field or magnetic field
US8051799B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2007 |
| Grant date | Nov 8, 2011 |
| Priority date | — |
| Expiry date | Mar 7, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/026
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus includes a housing defining a chamber in which an electric field is generated, and an internal member provided in the chamber. At least one part of the internal member is formed of a dielectric material. A process is executed in the chamber so that a dielectric deposit is formed on the at least one part of the internal member. An m1(d∈1/dm1) value of the dielectric material and an m2(d∈2/dm2) value of the dielectric deposit are set so that production of particles from the deposit is properly controlled. The term m1 is a mass density of the dielectric material, ∈1 is a permittivity of the dielectric material, m2 is a mass density of the dielectric deposit, and ∈2 is a permittivity of the dielectric deposit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.