Method for making titanium-based compound film of poly silicon solar cell
US8053038B2 · kind B2 · utility
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4References
12Claims
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Key dates
| Filing date | Sep 18, 2007 |
| Grant date | Nov 8, 2011 |
| Priority date | — |
| Expiry date | Sep 18, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method is disclosed for making a titanium-based compound film of a poly-silicon solar cell. In the method, a ceramic substrate is made of aluminum oxide. The ceramic substrate is coated with a titanium film in an e-gun evaporation system. Dichlorosilane is provided on the titanium film by atmospheric pressure chemical vapor deposition. A titanium-based compound film is formed on the ceramic substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.