Beam quality in FIB systems
US8053725B2 · kind B2 · utility
2Cited by
9References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2009 |
| Grant date | Nov 8, 2011 |
| Priority date | — |
| Expiry date | May 18, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Applicants have found that the asymmetrical energy distribution of ions from an ion source allow chromatic aberration to be reduced by filtering ions in the low energy beam tail without significantly reducing processing time. A preferred embodiment includes within an ion beam column a filter that removes the low energy ions from the beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.