Circular cylinder type piezoelectric actuator and piezoelectric element and scanning probe microscope using those
US8058780B2 · kind B2 · utility
1Cited by
1References
11Claims
0Family size
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Key dates
| Filing date | Feb 11, 2009 |
| Grant date | Nov 15, 2011 |
| Priority date | — |
| Expiry date | Jan 25, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q10/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The cylindrical piezoelectric actuator which comprised a piezoelectric element which provided electrode in each of an inner peripheral face and an outer peripheral face which was cylindrical at least, and drive power supply to drive it. And the outer side electrode of the piezoelectric element covered the substantially circumferential outer face entirety and it was connected to a ground potential, and the electrode in the internal perimeter surface connected to drive power supply.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.