Device including a contact detector
US8058886B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2008 |
| Grant date | Nov 15, 2011 |
| Priority date | — |
| Expiry date | Oct 2, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06794
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a probe for determining an electrical property of an area of a surface of a test sample, the probe is intended to be in a specific orientation relative to the test sample. The probe may comprise a supporting body defining a first surface. A plurality of cantilever arms (12) may extend from the supporting body in co-planar relationship with the first surface. The plurality of cantilever arms (12) may extend substantially parallel to each other and each of the plurality of cantilever arms (12) may include an electrical conductive tip for contacting the area of the test sample by movement of the probe relative to the surface of the test sample into the specific orientation. The probe may further comprise a contact detector (14) extending from the supporting body arranged so as to contact the surface of the test sample prior to any one of the plurality of cantilever arms (12) contacting the surface of the test sample when performing the movement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.