Patent · US Active

Cleaning method for turbo molecular pump

US8062432B2 · kind B2 · utility

0Cited by

11References

7Claims

0Family size

Assignee

TOKYO ELECTRON LIMITED · JP

Inventors

Eiichi Sugawara · Tokyo, JP
Tsuyoshi Moriya · Nirasaki, JP

Key dates

Filing date	Mar 24, 2008
Grant date	Nov 22, 2011
Priority date	—
Expiry date	Jul 8, 2030

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF05D2260/607
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A cleaning method for a turbo molecular pump, which enables the exhausting ability of the turbo molecular pump to be restored without bringing about a decrease in the productivity of a substrate processing apparatus. A vaporizing gas that vaporizes foreign matter attached to an internal surface of the turbo molecular pump is supplied toward the foreign matter.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.