Patent · US Active

Particle optical device with magnet assembly

US8063364B2 · kind B2 · utility

0Cited by

15References

26Claims

0Family size

Assignee

Carl Zeiss NTS GmbH · US

Inventors

Dirk Preikszas · Oberkochen, DE
Michael Steigerwald · Aalen, DE
Daniel Tobias · Oberkochen, DE
Andreas Eisele · Echterdingen, DE
Momme Mommsen · Oberkochen, DE
Dietmar Doenitz · Aalen, DE
Christian Hendrich · Aalen, DE

Key dates

Filing date	Dec 22, 2009
Grant date	Nov 22, 2011
Priority date	—
Expiry date	May 12, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/26
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle optical apparatus has a particle source for generating at least one beam of charged particles, and a magnet arrangement having two pole plates, which are arranged spaced apart from one another, such that the at least one beam of charged particles in operation passes through the pole plates, wherein trenches are provided in the pole plates, in which trenches coil wires are arranged. The trenches, when viewed in a cross section transverse to an extension direction of the trenches, have a smaller width in a region of a surface of the pole plates, than in a region arranged at a distance from the surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.