Memory devices, stylus-shaped structures, electronic apparatuses, and methods for fabricating the same
US8063393B2 · kind B2 · utility
7Cited by
11References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 5, 2008 |
| Grant date | Nov 22, 2011 |
| Priority date | — |
| Expiry date | May 25, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/13
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An exemplary hollow stylus-shaped structure is disclosed, including a hollow column spacer formed over a base layer and a hollow cone spacer stacked over the hollow column spacer, wherein the hollow cone spacer, the hollow column spacer, and the base layer form a space, and sidewalls of the hollow cone spacer and the hollow column spacer are made of silicon-containing organic or inorganic materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.