Pressure control method
US8070459B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 14, 2005 |
| Grant date | Dec 6, 2011 |
| Priority date | — |
| Expiry date | Sep 23, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D16/208
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The present invention relates to a method of setting the pressure in a chamber of a vacuum system to a required pressure, the system comprising a pressure control system including a pump for evacuating gas from the chamber and a flow controller for allowing the flow of gas into the chamber, the method comprising setting an initial flow into and/or out of the chamber for achieving a pressure above the required pressure so as to increase the rate of pressure increase, the initial flow occurring over a transient period which does not allow the pressure to exceed the required pressure, and setting a preset flow into and/or out of the chamber after the transient period has elapsed for achieving and maintaining the required pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.