Membrane for a MEMS condenser microphone
US8072010B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 25, 2006 |
| Grant date | Dec 6, 2011 |
| Priority date | — |
| Expiry date | Mar 13, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2231/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A membrane (2) for a microphone (1) is disclosed which comprises a first portion (A1), a second portion (A2), and elements (E1 . . . E4, E1′ . . . E4′), which connect said first (A1) and said second portion (A2). The second portion (A2) is arranged for a movement in relation to said first portion (A1) around an idle position, which movement includes at least a translatory component in a direction of movement (dm) normal to said membrane (2). The elements (E1 . . . E4, E1′ . . . E4′) are provided for definition of a spring constant for said movement around said idle position and are arranged substantially along the outer border of said second portion (A2).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.