Patent · US Active

Arrangement and method for focusing a multiplane image acquisition on a prober

US8072586B2 · kind B2 · utility

3Cited by

3References

4Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Michael Teich · Mannheim, DE
Ulf Hackius · Dresden, DE
Juliane Busch · Dresden, DE
Joerg Kiesewetter · Sacka, DE
Axel Becker · Altrip, DE

Key dates

Filing date	Jul 30, 2010
Grant date	Dec 6, 2011
Priority date	—
Expiry date	Jul 30, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/06
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A focused multi-planar image acquisition in real time even while a test object is moving, is achieved with a system and a method for a focused multi-planar image acquisition in a prober. When a surface of a test object is positioned laterally in relation to tips of separated probe needles, a microscope is focused on the surface of the test object at a first time and on a plane of the probe needles at a second time. The objective lens is provided with a microscope objective lens focusing system, which can focus the objective lens, independently of a vertical adjustment drive of the microscope, on the surface of the test object in a first focal plane and in a second focal plane, which is on a level with the probe needle tips.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.