Defective product inspection apparatus, probe positioning method and probe moving method
US8074293B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 26, 2009 |
| Grant date | Dec 6, 2011 |
| Priority date | — |
| Expiry date | Jan 21, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2482
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.