Patent · US Active

Processes for reconditioning multi-component electrodes

US8075701B2 · kind B2 · utility

5Cited by
11References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 30, 2008
Grant dateDec 13, 2011
Priority date
Expiry dateJun 1, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J37/32559
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A process for reconditioning a multi-component electrode comprising a silicon electrode bonded to an electrically conductive backing plate is provided. The process comprises: (i) removing metal ions from the multi-component electrode by soaking the multi-component electrode in a substantially alcohol-free DSP solution comprising sulfuric acid, hydrogen peroxide, and water and rinsing the multi-component electrode with de-ionized water; (ii) polishing one or more surfaces of the multi-component electrode following removal of metal ions there from; and (iii) removing contaminants from silicon surfaces of the multi-component electrode by treating the polished multi-component electrode with a mixed acid solution comprising hydrofluoric acid, nitric acid, acetic acid, and water and by rinsing the treated multi-component electrode with de-ionized water. Additional embodiments of broader and narrower scope are contemplated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.