Spatial light modulator with structured mirror surfaces
US8077377B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 24, 2009 |
| Grant date | Dec 13, 2011 |
| Priority date | — |
| Expiry date | Aug 7, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0808
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention relates to methods to improve SLMs, in particular to reflecting micromechanical SLMs, for applications with simple system architecture, high precision, high power handling capability, high throughput, and/or high optical processing capability. Applications include optical data processing, image projection, lithography, image enhancement, holography, optical metrology, coherence and wavefront control, and adaptive optics. A particular aspect of the invention is the achromatization of diffractive SLMs so they can be used with multiple wavelengths sequentially, simultaneously or as a result of spectral broadening in very short pulses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.