Patent assignee · SE · COMPANY

MICRONIC MYDATA AB

26Patents
26Active
26Granted
53Portfolio score

Filing activity: Oct 26, 2006 → Dec 3, 2018 · 14 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US8122846B2 Platforms, apparatuses, systems and methods for processing and analyzing substrates Emerging Cross-Sectional Technologies 47 Active
US8160351B2 Method and apparatus for mura detection and metrology Physics 20 Active
US7842525B2 Method and apparatus for personalization of semiconductor Electricity 13 Active
US8102410B2 Writing apparatuses and methods Electricity 8 Active
US7981303B2 Method of manufacturing monocrystalline silicon micromirrors Performing Operations; Transporting 6 Active
US8077377B2 Spatial light modulator with structured mirror surfaces Physics 5 Active
US8594825B2 Method and apparatus for alignment optimization with respect to plurality of layers for writing different layers with different machine configurations Electricity 4 Active
US9642294B2 Tape feeder and method for moving a carrier tape towards a picking position in a component mounting machine Emerging Cross-Sectional Technologies 3 Active
US9164373B2 Method and device for writing photomasks with reduced mura errors Physics 2 Active
US10111369B2 Method and device for automatic storage of tape guides Electricity 2 Active
US7957055B2 Pattern generator Electricity 2 Active
US8314941B2 Cartesian coordinate measurement for rotating system Physics 2 Active
US8137875B2 Method and apparatus for overlay compensation between subsequently patterned layers on workpiece Physics 2 Active
US8144307B2 Image forming method and apparatus Physics 1 Active
US8067134B2 Method of iterative compensation for non-linear effects in three-dimensional exposure of resist Emerging Cross-Sectional Technologies 1 Active
US8594824B2 Method and apparatus for performing pattern alignment to plurality of dies Electricity 1 Active
US8530120B2 Method and apparatus for performing pattern reconnection after individual or multipart alignment Electricity 1 Active
US8885145B2 Image reading and writing using a complex two-dimensional interlace scheme Physics 1 Active
US8614798B2 Pattern generators, calibration systems and methods for patterning workpieces Physics 0 Active
US11284517B2 System for direct writing on an uneven surface of a workpiece that is covered with a radiation sensitive layer using exposures having different focal planes Emerging Cross-Sectional Technologies 0 Active
US9975206B2 Composition of solid-containing paste Performing Operations; Transporting 0 Active
US9090095B2 Optical writer for flexible foils Physics 0 Active
US8570535B2 Pattern generators, calibration systems and methods for patterning workpieces Physics 0 Active
US8467117B2 Pattern generation systems and high bandwidth focus control system with suppressed reaction forces and noise Physics 0 Active
US8488105B2 Multi-table lithographic systems, lithography processing tools and methods for processing workpieces Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.