Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide
US8080615B2 · kind B2 · utility
34Cited by
60References
34Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 19, 2007 |
| Grant date | Dec 20, 2011 |
| Priority date | — |
| Expiry date | Apr 17, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24612
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Methods for fabricating a random graft PS-r-PEO copolymer and its use as a neutral wetting layer in the fabrication of sublithographic, nanoscale arrays of elements including openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. In some embodiments, the films can be used as a template or mask to etch openings in an underlying material layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.