Patent · US Active

Substrate carrier

US8083912B2 · kind B2 · utility

2Cited by

2References

10Claims

0Family size

Assignee

Applied Materials GmbH & Co. KG · DE

Inventors

Thomas Klug · Augsburg, DE
Oliver Heimel · Wabern, DE

Key dates

Filing date	Oct 20, 2005
Grant date	Dec 27, 2011
Priority date	—
Expiry date	Feb 21, 2029

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC03C2218/34
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A carrier for a substrate, wherein at least a part of the carrier contains a material with a coefficient of thermal expansion which is higher than the coefficient of thermal expansion of the substrate, wherein in a specified region of the carrier a bar is centrally fastened whose coefficient of thermal expansion is lower than that of the region on which it is fastened.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.