Oliver Heimel
4Patents
2h-index
7Co-inventors
37Inventor score
Filing activity: Oct 20, 2005 → Jun 26, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8282089B2 | Vacuum transport device with movable guide rail | Performing Operations; Transporting | 5 | Active |
| US10837111B2 | Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier | Electricity | 3 | Active |
| US8083912B2 | Substrate carrier | Chemistry; Metallurgy | 2 | Active |
| US11718904B2 | Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.