System, method, and apparatus for scanning detector for fast and frequent illumination uniformity correction module
US8085383B2 · kind B2 · utility
0Cited by
5References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 27, 2005 |
| Grant date | Dec 27, 2011 |
| Priority date | — |
| Expiry date | Nov 11, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70558
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided is a reticle masking blade system, including a reticle-masking blade device. Also included is a detector array mounted on an edge of a blade of the blade device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.