Optical element and method of calibrating a measuring apparatus comprising a wave shaping structure

US8089634B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Jochen Hetzler · Aalen, DE
• Frank Schillke · Aalen, DE
• Stefan Schulte · Marburg, DE
• Rolf Freimann · Aalen, DE
• Bernd Doerband · Aalen, DE

Key dates

• Filing date: Jan 8, 2010
• Grant date: Jan 3, 2012
• Expiry date: Jan 8, 2030

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49771
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Optical element having an optical surface, which optical surface is adapted to a non-spherical target shape, such that a long wave variation of the actual shape of the optical surface with respect to the target shape is limited to a maximum value of 0.2 nm, wherein the long wave variation includes only oscillations having a spatial wavelength equal to or larger than a minimum spatial wavelength of 10 mm.