Atomic force microscopy probe
US8091143B2 · kind B2 · utility
1Cited by
4References
26Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Apr 23, 2008 |
| Grant date | Jan 3, 2012 |
| Priority date | — |
| Expiry date | May 22, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe for atomic force microscopy (SM) comprising a micromechanical resonator (RMM) and a tip for atomic force microscopy (P1) projecting from said resonator, the probe being characterized in that: it also includes means (EL1) for selectively exciting a volume mode of oscillation of said resonator (RMM); and in that said tip for atomic force microscopy (P1, P1′) projects from said resonator substantially in correspondence with an antinode point (PV1) of said volume mode of oscillation. An atomic force microscope including such a probe (SM′). A method of atomic force microscopy including the use of such a probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.