Scanning probe microscope with automatic probe replacement function
US8099793B2 · kind B2 · utility
10Cited by
3References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2009 |
| Grant date | Jan 17, 2012 |
| Priority date | — |
| Expiry date | Jan 27, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An automatic probe exchange system for a scanning probe microscope (SPM) exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic force. When the magnetic force on the SPM side is greater, the probe is attached to the probe mount on the SPM. When the magnetic force on the probe tray side is greater, the probe is attached to the probe mount on the probe tray. The magnetic force on the probe tray side is varied by moving the magnets that generate the magnetic force on the probe tray side closer to or further from the probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.