One-dimensional arrays of block copolymer cylinders and applications thereof
US8101261B2 · kind B2 · utility
54Cited by
60References
48Claims
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Key dates
| Filing date | Feb 13, 2008 |
| Grant date | Jan 24, 2012 |
| Priority date | — |
| Expiry date | May 28, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24182
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods for fabricating sublithographic, nanoscale microstructures in one-dimensional arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.