Patent · US Active

Method and apparatus for thermal analysis of through-silicon via (TSV)

US8103996B2 · kind B2 · utility

12Cited by
5References
38Claims
0Family size

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Inventors

Key dates

Filing dateApr 1, 2009
Grant dateJan 24, 2012
Priority date
Expiry dateJun 11, 2029

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06F2119/08
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

Some embodiments of the invention provide a method for performing thermal analysis of an integrated circuit (“IC”) design layout. The IC design layout includes several wiring layers in some embodiments. The IC design layout includes a substrate that has at least one through-silicon via (“TSV”). The method divides the IC design layout into a set of elements. The method identifies a temperature distribution for the IC design layout by using the set of elements. In some embodiments, at least one element includes a metal component and a non-metal component. The non-metal component is silicon in some embodiments, and a dielectric in other embodiments.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.