Semiconductor dynamic quantity sensor and method of producing the same
US8106471B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 15, 2009 |
| Grant date | Jan 31, 2012 |
| Priority date | — |
| Expiry date | Feb 12, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor dynamic quantity sensor includes a sensor part and a cap connected to the sensor part. Dynamic quantity is detected based on a capacitance of a capacitor defined between a movable electrode and a fixed electrode of the sensor part. A float portion of the sensor part is separated from a support board of the sensor part to define a predetermined interval. At least one of the cap and the support board has a displacing portion displacing the float portion in a direction perpendicular to the support board so as to change the predetermined interval. The movable electrode has a displacement in accordance with the displaced float portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.