Imprint device and imprint method
US8113816B2 · kind B2 · utility
0Cited by
3References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2007 |
| Grant date | Feb 14, 2012 |
| Priority date | — |
| Expiry date | Mar 8, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29L2017/005
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An imprint device transfers a finely patterned structure created on a stamper onto a material to be patterned, by bringing the stamper and the material to be patterned in contact with each other. At least one chamfered edge portion is formed at least one of the stamper and the material to be patterned. The imprint device has a separating unit for holding the chamfered edge portion of at least one of the stamper and the material to be patterned, so as to separate the stamper from the material to be patterned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.