Multi-layer method for formation of registered arrays of cylindrical pores in polymer films
US8114300B2 · kind B2 · utility
45Cited by
60References
35Claims
0Family size
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Key dates
| Filing date | Apr 21, 2008 |
| Grant date | Feb 14, 2012 |
| Priority date | — |
| Expiry date | Apr 21, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2462
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Methods for fabricating sublithographic, nanoscale polymeric microstructures utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.