Piezoelectric actuator provided with a displacement meter, piezoelectric element, and positioning device
US8115367B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 24, 2008 |
| Grant date | Feb 14, 2012 |
| Priority date | — |
| Expiry date | Oct 20, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/802
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
By resistor attached by a piezoelectric element, measurement with high accuracy is possible by strain of the piezoelectric element. A piezoelectric actuator includes the piezoelectric element which is formed into an arbitrary shape, polarized in an arbitrary direction, and includes electrodes provided on at least two surfaces opposed in a thickness direction thereof. The piezoelectric actuator also includes a driver power supply for applying a voltage between the electrodes to generate strain in the piezoelectric element, a driver power supply for applying a voltage to generate strain in the piezoelectric element, resistors provided on the electrodes through intermediation of insulators, and a displacement detection device connected with the resistors. The electrodes of the piezoelectric element on which the resistors are provided are set at a ground potential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.