Method and system for detection of solid materials in a plasma using an electromagnetic circuit
US8119413B2 · kind B2 · utility
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28References
13Claims
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Key dates
| Filing date | Jul 26, 2010 |
| Grant date | Feb 21, 2012 |
| Priority date | — |
| Expiry date | Jul 26, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/023
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.