Method of forming a micro-electromechanical system (MEMS) having a gap stop
US8119431B2 · kind B2 · utility
5Cited by
8References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2009 |
| Grant date | Feb 21, 2012 |
| Priority date | — |
| Expiry date | Dec 8, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of forming a micro-electromechanical system (MEMS) includes providing a cap substrate, providing a support substrate, depositing a conductive material over the support substrate, patterning the conductive material to form a gap stop and a contact, wherein the gap stop is separated form the contact by an opening, forming a bonding material over the contact and in the opening, wherein the gap stop and the contact prevent the bonding material from extending outside the opening, and attaching the cap substrate to the support substrate by the step of forming the bonding material. In addition, the structure is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.