Method and apparatus for phase-compensated sensitivity-enhanced spectroscopy (PCSES)
US8125641B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 27, 2009 |
| Grant date | Feb 28, 2012 |
| Priority date | — |
| Expiry date | Sep 4, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/213
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for convolving spectroscopic data with certain phase information for practicing phase-compensated sensitivity-enhanced spectroscopy (PCSES). PCSES uses a beam of radiation in a polarization state PSp from a source emitting at a plurality of wavelengths, and places in the beam a compensator capable of altering polarization state PSp by applying a delimited phase shift Δ between two orthogonal polarization axes of the radiation to restrict a finely-vibrating spectrum. A sample disposed in the beam after the compensator generates a response beam by reflection, transmission or even both. A polarization state PSa of the response beam is passed to a detector to determine a spectrum of the response beam. A first spectrum is collected when polarization states PSp, PSa and the compensator are in a first polarization-altering configuration and a second spectrum is collected when polarization states PSp, PSa and the compensator are in a second polarization-altering configuration. A phase-compensated spectrum is then derived from just the first and second spectra thereby allowing the user to undertake optical characterization, including the measurement of film thickness …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.