Apparatus and method for the determination of the position of a disk-shaped object

US8125653B2 · kind B2 · utility

Assignee

• Vistec Semiconductor Systems Jena GmbH · DE

Inventors

• Gert Weniger · Jena, DE
• Ulrich Pohlmann · Jena, DE
• Frank Rennicke

Key dates

• Filing date: Sep 9, 2009
• Grant date: Feb 28, 2012
• Expiry date: Apr 21, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67742
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The invention relates to an apparatus for the determination of the position of a disc-shaped object, particularly of a wafer (10). Thereby, a mount (14) for supporting the sensor device (11) is provided on a movable carrier (22).