Use of blended solvents in defectivity prevention
US8129089B2 · kind B2 · utility
0Cited by
5References
10Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 6, 2010 |
| Grant date | Mar 6, 2012 |
| Priority date | — |
| Expiry date | Jan 6, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/168
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a blended solvent for solubilizing an ultraviolet photoresist. The blended solvent comprises a mixture of from about 5 vol % to about 95 vol % of a first solvent, wherein the first solvent comprises a cyclic ester. A balance of the mixture comprises a second solvent, wherein the second solvent comprises a volatile organic liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.