Connection board, probe card, and electronic device test apparatus comprising same
US8134381B2 · kind B2 · utility
4Cited by
5References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2008 |
| Grant date | Mar 13, 2012 |
| Priority date | — |
| Expiry date | Mar 18, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07342
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card is provided which includes: probe needles electrically contacting input/output terminals of an IC device formed on a semiconductor wafer W; a mount base on which the probe needles are mounted; a support column supporting the mount base, a circuit board having interconnect patterns electrically connected to the probe needles via bonding wires; and a base member and stiffener for reinforcing the probe card. The mount base and the circuit board are noncontact.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.