Dynamic range extension in surface inspection systems
US8134698B1 · kind B1 · utility
3Cited by
9References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2008 |
| Grant date | Mar 13, 2012 |
| Priority date | — |
| Expiry date | Jan 12, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1241
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly generates primary and secondary beams. Data collected from the reflections of the primary and secondary beams may be used in a dynamic range extension routine, alone or in combination with a power attenuation routine.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.