Bret Whiteside
14Patents
3h-index
30Co-inventors
56Inventor score
Filing activity: Mar 14, 2008 → May 31, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9891177B2 | TDI sensor in a darkfield system | Physics | 43 | Active |
| US8432944B2 | Extending the lifetime of a deep UV laser in a wafer inspection tool | Physics | 5 | Active |
| US9664909B1 | Monolithic optical beam splitter with focusing lens | Physics | 4 | Active |
| US9068952B2 | Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system | Physics | 3 | Active |
| US8134698B1 | Dynamic range extension in surface inspection systems | Physics | 3 | Active |
| US10215712B2 | Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system | Physics | 3 | Active |
| US10324045B2 | Surface defect inspection with large particle monitoring and laser power control | Physics | 3 | Active |
| US9182358B2 | Multi-spot defect inspection system | Physics | 1 | Active |
| US11733172B2 | Apparatus and method for rotating an optical objective | Physics | 0 | Active |
| US9678350B2 | Laser with integrated multi line or scanning beam capability | Electricity | 0 | Active |
| US12322620B2 | Reflective waveplates for pupil polarization filtering | Physics | 0 | Active |
| US11366307B2 | Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection | Physics | 0 | Active |
| US11181484B1 | Systems and methods for advanced defect ablation protection | Physics | 0 | Active |
| US8934091B2 | Monitoring incident beam position in a wafer inspection system | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.