Inventor · Gilroy, CA, US

Bret Whiteside

14Patents
3h-index
30Co-inventors
56Inventor score

Filing activity: Mar 14, 2008 → May 31, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9891177B2 TDI sensor in a darkfield system Physics 43 Active
US8432944B2 Extending the lifetime of a deep UV laser in a wafer inspection tool Physics 5 Active
US9664909B1 Monolithic optical beam splitter with focusing lens Physics 4 Active
US9068952B2 Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system Physics 3 Active
US8134698B1 Dynamic range extension in surface inspection systems Physics 3 Active
US10215712B2 Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system Physics 3 Active
US10324045B2 Surface defect inspection with large particle monitoring and laser power control Physics 3 Active
US9182358B2 Multi-spot defect inspection system Physics 1 Active
US11733172B2 Apparatus and method for rotating an optical objective Physics 0 Active
US9678350B2 Laser with integrated multi line or scanning beam capability Electricity 0 Active
US12322620B2 Reflective waveplates for pupil polarization filtering Physics 0 Active
US11366307B2 Programmable and reconfigurable mask with MEMS micro-mirror array for defect detection Physics 0 Active
US11181484B1 Systems and methods for advanced defect ablation protection Physics 0 Active
US8934091B2 Monitoring incident beam position in a wafer inspection system Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.