Monolithic vacuum manometer utilizing electrostatic interference as a means of detection
US8141430B2 · kind B2 · utility
6Cited by
6References
30Claims
0Family size
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Key dates
| Filing date | Jun 30, 2010 |
| Grant date | Mar 27, 2012 |
| Priority date | — |
| Expiry date | Sep 25, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in response to a diaphragm disturbing the parasitic capacitive coupling between the conductive elements. A signal representative of the sensed change in parasitic capacitive coupling may be output.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.