MEMS resonator
US8143971B2 · kind B2 · utility
6Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 10, 2009 |
| Grant date | Mar 27, 2012 |
| Priority date | — |
| Expiry date | Mar 4, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P7/00
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A MEMS resonator, comprising a planar resonator body formed of two different materials with opposite sign temperature coefficient of Young's modulus. A first portion of one material extends across the full thickness of the resonator body. This provides a design which allows reduced temperature drift.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.