Patent · US Active

Image forming method and apparatus

US8144307B2 · kind B2 · utility

1Cited by

7References

12Claims

0Family size

Assignee

MICRONIC MYDATA AB · SE

Inventor

Torbjorn Sandstrom · Mölnlycke, SE

Key dates

Filing date	Nov 4, 2008
Grant date	Mar 27, 2012
Priority date	—
Expiry date	Jul 25, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70466
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An array of phase-shifting micro-mechanical elements are used in a method and device for patterning a workpiece, for exposing a radiation sensitive layer on a workpiece such as a mask or a device substrate. The phase-shifting micro-mechanical elements are individually driven to modulate the electromagnetic radiation such that a high degree of control and precision in patterning is achieved. In some embodiments, the motion of the workpiece is synchronized with the relayed electromagnetic radiation that is modulated by the phase-shifting micro-mechanical elements in order to further control and increase precision in the patterning of the workpiece.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.