Patent · US Active

Method and system for process optimization

US8146024B2 · kind B2 · utility

2Cited by

8References

21Claims

0Family size

Assignee

Cadence Design Systems, Inc. · US

Inventors

Kevin Chan · Scarborough, CA
Emmanuel Drege · San Jose, US
Nickhil Jakatdar · Los Altos, US
Svetlana Litvintseva · San Jose, US
Mark A. Miller · Hutchinson, US
Francis Raquel · Danville, US

Key dates

Filing date	Dec 18, 2006
Grant date	Mar 27, 2012
Priority date	—
Expiry date	Jul 26, 2028

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P90/02
WIPO fieldControl
WIPO sectorInstruments

Abstract

A method and apparatus for process optimization is provided. Process optimization improves parametric and functional yield post mask manufacturing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.