MEMS sensor with movable z-axis sensing element
US8146425B2 · kind B2 · utility
23Cited by
4References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 5, 2008 |
| Grant date | Apr 3, 2012 |
| Priority date | — |
| Expiry date | Oct 9, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P21/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure positioned radially outward from the MEMS structure. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.