Patent · US Active

Sensor system and method for manufacturing a sensor system

US8146439B2 · kind B2 · utility

1Cited by

0References

11Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Marcus Ahles · Pfullingen, DE
Hubert Benzel · Neckartenzlingen, DE

Key dates

Filing date	Sep 21, 2010
Grant date	Apr 3, 2012
Priority date	—
Expiry date	Oct 15, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49124
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor system, in particular a pressure sensor system, having a substrate having a main extension plane, the substrate having at least one trench on a first side, and the trench being provided to produce a diaphragm area on a second side of the substrate diametrically opposite to the first side perpendicularly to the main extension plane, and a decoupling element further being integrated in the material of the diaphragm area.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.